Search A-Z index Contact
University of Cambridge Home Nanoscience Laboratory Intranet
University of Cambridge >  Nanoscience Laboratory Intranet > Cleanroom & Lab Information > Cleanroom Info
 

Nanoscience Centre Cleanroom

Layout of the Cleanroom

Cleanroom Layout

The class number refers to the maximum number of particles bigger than 0.5µm that would be allowed in one cubic foot of cleanroom air. A Class 100 cleanroom, for example, would not contain more than 100 particles bigger than half a micron in a cubic foot of air. 

Cleanroom Class
ISO 14644-1 FED STD 209E
ISO 3 1
ISO 4 10
ISO 5 100
ISO 6 1,000
ISO 7 10,000
ISO 8 100,000
particle/m3
Class 0.1 µm 0.2 µm 0.3 µm 0.5 µm 1 µm 5 µm
ISO 1 10 2        
ISO 2 100 24 10 4    
ISO 3 1,000 237 102 35 8  
ISO 4 10,000 2,370 1,020 352 83  
ISO 5 100,000 23,700 10,200 3,520 832 29
ISO 6 1,000,000 237,000 102,000 35,200 8,320 293
ISO 7       352,000 83,200 2,390
ISO 8       3,520,000 832,000 29,300
ISO 9       35,200,000 8,320,000 293,000
particle/ft3
Class 0.1 µm 0.2 µm 0.3 µm 0.5 µm 1 µm 5 µm
1 35 7 3 1    
10 350 75 30 10 1  
100 3,500 750 300 100 10 1
1,000       1,000 100 10
10,000       10,000 1,000 100
100,000       100,000 10,000 1,000

 

General Movement in the Clean room

Air pressure in the cleanroom is regulated as soon as you enter the changing room. Air pressure increases as you move through the cleanroom ensuring dust particles are blown from clean areas to dirty areas. In addition to the 3 main areas there is a 'grey' low pressure area where equipment and gas bottles are stored. This is the dirtiest area and as such should NOT be entered from a clean bay. This de-pressurizes the clean bay allowing contamination.
  • Do not enter rooms unless you need to use the equipment in them - this will help reduce cross contamination between rooms.
  • Do not move equipment or tools from room to room - the correct tools and equipment should be available in each room, if extra tools are needed in a bay ask the Lab Manager.
  • Do not enter the service corridors unless absolutely necessary. The corridors are a 'grey area' and access to them should be minimized.
  • Do not adjust settings on equipment (e.g. gas and water flows, air pressures etc) without the knowledge and consent of the person responsible for that equipment.

top back to top

last updated 21-09-2015